Dr. Anil U. Mane

Profile

Academic positionPost Doc
Research fieldsExperimental Condensed Matter Physics,Thermodynamics and Kinetics as well as Properties of Phases and Microstructure of Materials,Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
KeywordsALE, ALD, ALCVD, , CMOS Technology, Thin films, DRAM, Interconnects, High k-dielectric, , Pr2O3 (praseodymium oxide)

Current contact address

CountryUnited States of America
CityLemont
InstitutionArgonne National Laboratory
InstituteEnergy Systems Division

Host during sponsorship

Dr. Hans-Joachim MüssigBreakthrough Department, Innovations for High Performance Microelectronics Institut für innovative Mikroelektronik (IHP), Frankfurt (Oder)
Start of initial sponsorship01/03/2004

Programme(s)

2003Humboldt Research Fellowship Programme